Large-capacity polysilicon ingot furnace thermal field structure
The utility model relates to a large-capacity polysilicon ingot furnace thermal field structure. The polysilicon ingot furnace thermal field structure comprises a furnace body, a thermal field box arranged in the furnace body, a crucible arranged in the thermal field box and heaters arranged in the...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a large-capacity polysilicon ingot furnace thermal field structure. The polysilicon ingot furnace thermal field structure comprises a furnace body, a thermal field box arranged in the furnace body, a crucible arranged in the thermal field box and heaters arranged in the thermal field box outside the crucible, wherein the heaters comprise a top heater and a side heater connected with the top heater in parallel; the top heater consists of a plurality of bent blocks made of CFC (Chloro Flouro Carbon) or graphite and is fixed at the top of the furnace body through an electrode; and the side heater is of a frame shape and enclosed by a CFC plate or a graphite plate. According to the polysilicon ingot furnace thermal field structure, the heater structure of the polysilicon ingot furnace is improved, the height of a heat exchange platform is reduced, a placement space of the crucible is increased, and the size and the height in the length direction and the width direction are effectively |
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