Silicon chip cleaning system

A silicon chip cleaning system comprises a water supply device, a water purifying device, a cleaning machine and a preflush machine; the input end of the water purifying device used for supplying purified water is communicated with the water supply device; the input end of the cleaning machine which uses and consumes purified water is communicated with the output end of the water purifying device; the input end of the preflush machine is directly connected with the water supply device; the silicon chip cleaning system further comprises a main water storage tank, whose input end is communicated with the output end of the water purifying device and the output end of the cleaning machine and which is used for storing and filtering; and the output end of the main water storage tank is communicated with the input end of the preflush machine. The preflush machine takes mixed water composed of RO water produced during production of purified water and cleaning waste water produced by the cleaning machine as the main