Automatic cleaning equipment for solar silicon wafer before diffusion

The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overfl...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MA YUE, SHI DAJIAN, JIN JIAYUAN, SHEN ZHUAN, ZHOU XIAODONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator MA YUE
SHI DAJIAN
JIN JIAYUAN
SHEN ZHUAN
ZHOU XIAODONG
description The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overflow cleaning tank, a heat slow pulling tank and a circulating hot-air drying device are sequentially arranged behind the material loading bench. A blanking bench is arranged behind the circulating hot-air drying device. The pickling tank is connected with an on-line heating device. The overflow pre-cleaning tank, the pickling tank, the first overflow cleaning tank, the second overflow cleaning tank, the heat slow pulling tank and the circulating hot-air drying device are fixedly arranged on a frame. A single-arm load-moving type manipulator is arranged on a slide rail on one side of the frame. The automatic cleaning equipment is reasonable in structure. The DI Water overflow pre-cleaning process is additionally arra
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_CN202180065UU</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>CN202180065UU</sourcerecordid><originalsourceid>FETCH-epo_espacenet_CN202180065UU3</originalsourceid><addsrcrecordid>eNrjZHB1LC3Jz00syUxWSM5JTczLzEtXSC0szSzITc0rUUjLL1Iozs9JBJKZOZnJ-XkK5YlpqUUKSalAmVSFlMy0tNLizPw8HgbWtMSc4lReKM3NoOTmGuLsoZtakB-fWlyQmJyal1oS7-xnZGBkaGFgYGYaGmpMlCIAj2Y0WA</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Automatic cleaning equipment for solar silicon wafer before diffusion</title><source>esp@cenet</source><creator>MA YUE ; SHI DAJIAN ; JIN JIAYUAN ; SHEN ZHUAN ; ZHOU XIAODONG</creator><creatorcontrib>MA YUE ; SHI DAJIAN ; JIN JIAYUAN ; SHEN ZHUAN ; ZHOU XIAODONG</creatorcontrib><description>The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overflow cleaning tank, a heat slow pulling tank and a circulating hot-air drying device are sequentially arranged behind the material loading bench. A blanking bench is arranged behind the circulating hot-air drying device. The pickling tank is connected with an on-line heating device. The overflow pre-cleaning tank, the pickling tank, the first overflow cleaning tank, the second overflow cleaning tank, the heat slow pulling tank and the circulating hot-air drying device are fixedly arranged on a frame. A single-arm load-moving type manipulator is arranged on a slide rail on one side of the frame. The automatic cleaning equipment is reasonable in structure. The DI Water overflow pre-cleaning process is additionally arra</description><language>chi ; eng</language><subject>CLEANING ; CLEANING IN GENERAL ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; TRANSPORTING</subject><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20120404&amp;DB=EPODOC&amp;CC=CN&amp;NR=202180065U$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76290</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20120404&amp;DB=EPODOC&amp;CC=CN&amp;NR=202180065U$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MA YUE</creatorcontrib><creatorcontrib>SHI DAJIAN</creatorcontrib><creatorcontrib>JIN JIAYUAN</creatorcontrib><creatorcontrib>SHEN ZHUAN</creatorcontrib><creatorcontrib>ZHOU XIAODONG</creatorcontrib><title>Automatic cleaning equipment for solar silicon wafer before diffusion</title><description>The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overflow cleaning tank, a heat slow pulling tank and a circulating hot-air drying device are sequentially arranged behind the material loading bench. A blanking bench is arranged behind the circulating hot-air drying device. The pickling tank is connected with an on-line heating device. The overflow pre-cleaning tank, the pickling tank, the first overflow cleaning tank, the second overflow cleaning tank, the heat slow pulling tank and the circulating hot-air drying device are fixedly arranged on a frame. A single-arm load-moving type manipulator is arranged on a slide rail on one side of the frame. The automatic cleaning equipment is reasonable in structure. The DI Water overflow pre-cleaning process is additionally arra</description><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>PERFORMING OPERATIONS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHB1LC3Jz00syUxWSM5JTczLzEtXSC0szSzITc0rUUjLL1Iozs9JBJKZOZnJ-XkK5YlpqUUKSalAmVSFlMy0tNLizPw8HgbWtMSc4lReKM3NoOTmGuLsoZtakB-fWlyQmJyal1oS7-xnZGBkaGFgYGYaGmpMlCIAj2Y0WA</recordid><startdate>20120404</startdate><enddate>20120404</enddate><creator>MA YUE</creator><creator>SHI DAJIAN</creator><creator>JIN JIAYUAN</creator><creator>SHEN ZHUAN</creator><creator>ZHOU XIAODONG</creator><scope>EVB</scope></search><sort><creationdate>20120404</creationdate><title>Automatic cleaning equipment for solar silicon wafer before diffusion</title><author>MA YUE ; SHI DAJIAN ; JIN JIAYUAN ; SHEN ZHUAN ; ZHOU XIAODONG</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_CN202180065UU3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>chi ; eng</language><creationdate>2012</creationdate><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>MA YUE</creatorcontrib><creatorcontrib>SHI DAJIAN</creatorcontrib><creatorcontrib>JIN JIAYUAN</creatorcontrib><creatorcontrib>SHEN ZHUAN</creatorcontrib><creatorcontrib>ZHOU XIAODONG</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MA YUE</au><au>SHI DAJIAN</au><au>JIN JIAYUAN</au><au>SHEN ZHUAN</au><au>ZHOU XIAODONG</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Automatic cleaning equipment for solar silicon wafer before diffusion</title><date>2012-04-04</date><risdate>2012</risdate><abstract>The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overflow cleaning tank, a heat slow pulling tank and a circulating hot-air drying device are sequentially arranged behind the material loading bench. A blanking bench is arranged behind the circulating hot-air drying device. The pickling tank is connected with an on-line heating device. The overflow pre-cleaning tank, the pickling tank, the first overflow cleaning tank, the second overflow cleaning tank, the heat slow pulling tank and the circulating hot-air drying device are fixedly arranged on a frame. A single-arm load-moving type manipulator is arranged on a slide rail on one side of the frame. The automatic cleaning equipment is reasonable in structure. The DI Water overflow pre-cleaning process is additionally arra</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language chi ; eng
recordid cdi_epo_espacenet_CN202180065UU
source esp@cenet
subjects CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
title Automatic cleaning equipment for solar silicon wafer before diffusion
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-29T06%3A31%3A26IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=MA%20YUE&rft.date=2012-04-04&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3ECN202180065UU%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true