Automatic cleaning equipment for solar silicon wafer before diffusion
The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overfl...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overflow cleaning tank, a heat slow pulling tank and a circulating hot-air drying device are sequentially arranged behind the material loading bench. A blanking bench is arranged behind the circulating hot-air drying device. The pickling tank is connected with an on-line heating device. The overflow pre-cleaning tank, the pickling tank, the first overflow cleaning tank, the second overflow cleaning tank, the heat slow pulling tank and the circulating hot-air drying device are fixedly arranged on a frame. A single-arm load-moving type manipulator is arranged on a slide rail on one side of the frame. The automatic cleaning equipment is reasonable in structure. The DI Water overflow pre-cleaning process is additionally arra |
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