Automatic cleaning equipment for solar silicon wafer before diffusion

The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overfl...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: MA YUE, SHI DAJIAN, JIN JIAYUAN, SHEN ZHUAN, ZHOU XIAODONG
Format: Patent
Sprache:chi ; eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:The utility model discloses automatic cleaning equipment for solar silicon wafers before the diffusion process, which comprises a material loading bench, a microcomputer control system and a touch screen. An overflow pre-cleaning tank, a pickling tank, a first overflow cleaning tank, a second overflow cleaning tank, a heat slow pulling tank and a circulating hot-air drying device are sequentially arranged behind the material loading bench. A blanking bench is arranged behind the circulating hot-air drying device. The pickling tank is connected with an on-line heating device. The overflow pre-cleaning tank, the pickling tank, the first overflow cleaning tank, the second overflow cleaning tank, the heat slow pulling tank and the circulating hot-air drying device are fixedly arranged on a frame. A single-arm load-moving type manipulator is arranged on a slide rail on one side of the frame. The automatic cleaning equipment is reasonable in structure. The DI Water overflow pre-cleaning process is additionally arra