Mechanism for mounting temperature measuring probe of silicon single crystal furnace

The utility model discloses a mechanism for mounting a temperature measuring probe of a silicon single crystal furnace, which comprises the temperature measuring probe. The temperature measuring probe is mounted on a silicon single crystal furnace body through a mounting flange, a plurality of mount...

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1. Verfasser: HUI MENGJUN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model discloses a mechanism for mounting a temperature measuring probe of a silicon single crystal furnace, which comprises the temperature measuring probe. The temperature measuring probe is mounted on a silicon single crystal furnace body through a mounting flange, a plurality of mounting holes which are distributed asymmetrically are formed on the mounting flange and are positioned on the same circumference, and fixing screws are utilized for penetrating the mounting holes so as to fix the temperature measuring probe. The mounting holes on the mounting flange of the mechanism for mounting the temperature measuring probe of the silicon single crystal furnace adopt the asymmetrical distribution, thereby avoiding generating position deviation during maintenance, disassembly and assembly and ensuring the consistency in mounting every time; and furthermore, the mechanism is not only simple in structure and easy to realize, but also convenient and fast in mounting, and the temperature deviation cause