Energy-saving polysilicon reduction furnace with heat shield

The utility model relates to an energy-saving polysilicon reduction furnace with a heat shield, which comprises a bell-jar-shaped furnace wall, a chassis arranged below the furnace wall, an electrode arranged on the chassis and a silicon core rod installed on the electrode, wherein the chassis is al...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	ZHANG CHUNLIN, LIU JUN, SUN YINXIANG, PU QUANFU, ZHANG YUKU, CHEN YANMEI, PAN LUNTAO, ZHANG RUYOU, CHEN GUOQI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPOUNDS THEREOF GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	The utility model relates to an energy-saving polysilicon reduction furnace with a heat shield, which comprises a bell-jar-shaped furnace wall, a chassis arranged below the furnace wall, an electrode arranged on the chassis and a silicon core rod installed on the electrode, wherein the chassis is also provided with raw material gas inlets and a tail gas exhaust hole. The energy-saving polysilicon reduction furnace with the heat shield is characterized in that the chassis is provided with the bell-jar-shaped heat shield which is concentric with the furnace wall, covers the silicon core rod and consists of a cylinder part and a top part with a through hole; the top part is connected with the cylinder part, the tail gas exhaust hole is arranged in the center of the chassis, and the chassis between the cylinder part of the heat shield and the furnace wall as well as the chassis in the cylinder part are both provided with the raw material gas inlets. In the polysilicon reduction furnace, the heat shield is adopted