Drying device for clean container
The utility model provides a drying device for a clean container, which comprises a clean drying oven and a clean container arranged in the clean drying oven. The clean container is connected with a suction drying pipeline which is connected to a gas displacement pipeline, a leakage detector and a c...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a drying device for a clean container, which comprises a clean drying oven and a clean container arranged in the clean drying oven. The clean container is connected with a suction drying pipeline which is connected to a gas displacement pipeline, a leakage detector and a cold trap; and the cold trap is connected with an inlet of a vacuum pump through a pipeline. The suction drying pipeline can be switched according to the requirement for a container interface; the drying device can be used for carrying out leakage detection on the container with high leakage rate under the completely-closed clean condition; no pollution generates in the drying process of the container with high requirement on the cleanness; the drying and the ventilating are integrated, and thus the time is saved, the storage environment of high-purity dangerous chemical products is improved, and the drying and ventilating period is greatly shortened. |
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