Wafer stabilizing spacer
The utility model relates to a wafer stabilizing spacer which mainly comprises a fixed spacer; and two sides of the fixed spacer are respectively provided with a contact part to be smoothly contacted with the wafer so as to prevent the damage to the contact part and the wafer, a plurality of support...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model relates to a wafer stabilizing spacer which mainly comprises a fixed spacer; and two sides of the fixed spacer are respectively provided with a contact part to be smoothly contacted with the wafer so as to prevent the damage to the contact part and the wafer, a plurality of support parts are connected and arranged between the fixed spacer and the contact parts to enhance the strength of the fixed spacer, a hollowing part for increasing elasticity is formed among the support parts respectively, a plurality of pivoting parts are formed on the fixed spacer, the pivoting parts are pivoted with a fixed seat so as to be convenient to assemble, and are fixed in a shell cover by the fixed seat for fixing the wafer, and the bottom end of the fixed spacer is provided with a rotating wheel, so that the generation of particulate dust can be reduced when the wafer stabilizing spacer is used. |
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