Double-flash evaporation device for preparing superlattice thermoelectric thin-film material

The utility model provides a double-flash evaporation device for preparing a superlattice thermoelectric thin-film material. The material has the structure that a substrate device consists of a speed adjusting electromotor, a substrate bracket, a heating device, a substrate, a quartz crystalloid osc...

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Bibliographische Detailangaben
Hauptverfasser: DUAN XINGKAI, HU KONGGANG, JIANG YUEZHEN
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The utility model provides a double-flash evaporation device for preparing a superlattice thermoelectric thin-film material. The material has the structure that a substrate device consists of a speed adjusting electromotor, a substrate bracket, a heating device, a substrate, a quartz crystalloid oscillating depth detector, a baffle board and a thermoelectric couple, wherein the speed adjusting electromotor is connected with the substrate bracket, the substrate is arranged under the substrate bracket, the substrate bracket is arranged in a vacuum cavity body, the speed adjusting electromotor drives the substrate bracket and the substrate to rotate, the heating device is used for heating the substrate, and the thermoelectric couple is used for detecting the temperature of the substrate. By combining a flash evaporation method with a two-way alternate powder feeder, the device prepares the superlattice thermoelectric thin-film material, and has the advantages of high efficiency, energy conservation, low cost, si