Treatment device, transport device and mobile transverse chamber for substrates

The utility model discloses a treatment device, a transport device and a mobile transverse chamber for substrates. The device treatment device comprises two or more process modules, a substrate conveying device, a load lock chamber and a transverse substrate treatment device, wherein the transverse...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	WU ZIZHONG, ZHU LECONG, LEI ZHONGLI, LIU HONGCANG, WANG XIAOMING, RON ROS, MAI HUASHAN, LUO YINGCONG, PU XIANGXUN, PU QIANDUI, SHEN ZHENYU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The utility model discloses a treatment device, a transport device and a mobile transverse chamber for substrates. The device treatment device comprises two or more process modules, a substrate conveying device, a load lock chamber and a transverse substrate treatment device, wherein the transverse substrate treatment device comprises mobile transverse chambers used for conveying the substrates to the process modules; and when the substrates are conveyed, each mobile transverse chamber is kept under a specific gas condition. The transverse substrate treatment device further comprises a rail and a drive device, wherein the rail is arranged in the neighboring position of a process module inlet and used for supporting the mobile transverse chambers; and the drive device is used for enabling the mobile transverse chambers to move on the rail.