Polycrystalline silicon hydrogen reduction furnace
The utility model provides a polycrystalline silicon hydrogen reduction furnace, comprising furnace mantles and a furnace plate, wherein the furnace mantles are provided with cooling devices and are arranged on the furnace plate; an air inlet pipe and an air outlet pipe are distributed on the furnac...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a polycrystalline silicon hydrogen reduction furnace, comprising furnace mantles and a furnace plate, wherein the furnace mantles are provided with cooling devices and are arranged on the furnace plate; an air inlet pipe and an air outlet pipe are distributed on the furnace plate, and a spout is arranged on the air inlet end of the air inlet pipe; heating electrodes are arranged on the furnace plate, and silicon core rods are arranged on the heating electrodes in an one-to-one correspondence way; the air inlet pipe arranged at the lower part of the reduction furnace plate is detachably connected with the spout arranged at the upper part of the reduction furnace plate; and the spout is made of graphite. The polycrystalline silicon hydrogen reduction furnace effectively realizes that the jetting velocity of the spout is changed under the same flow rate, and that the gas material is jetted out at any position of the furnace plate without the distribution limit of the air inlet pipe on |
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