Ultraviolet laser machining system of diaphragm for scanning electron microscope

The utility model relates to an ultraviolet laser processing system of an aperture used in scanning electron microscope, which is mainly composed of an ultraviolet laser (1), a computer (2), an optical scanner system (3), a processed material of molybdenum sheet (4), a clamp (5) and a work bench (6). A laser beam (7) which is emitted by the ultraviolet laser (1) is horizontally incident into the optical scanner system (3), the light beam is turned to be vertically downward after passing through a reflector of the optical system, focused on the work bench by a f-Theta focus lens of the optical scanner system and fixed on the molybdenum sheet (4) in the clamp (5), and two methods of laser micro-drilling and laser micro-cutting opening are adopted for processing micro-holes and small holes within the range of 15mum to 300mum. The ultraviolet laser processing system utilizes the advantages of the high-power ultraviolet laser micro-processing and the precise scanning of the optical scanner system to carry out the