Polycrystalline silicon hydrogen reducing furnace suitable for low-voltage normal power supply hot start
The utility model provides a polycrystalline silicone hydrogen reducing furnace applicable to startup under low-voltage normal power, comprising a furnace shell with a cooling device. The furnace is positioned on an chassis; an air intake device and an air outtake device are arranged on the chassis...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The utility model provides a polycrystalline silicone hydrogen reducing furnace applicable to startup under low-voltage normal power, comprising a furnace shell with a cooling device. The furnace is positioned on an chassis; an air intake device and an air outtake device are arranged on the chassis which is also provided with heating electrodes that are correspondingly provided with silica core rods; the silica core rods and the heating electrodes are 18 pairs respectively, namely 36 for each, and are arranged evenly round three concentric circles on the chassis, with 3 pairs for the inner circle, 5 pairs for the middle circle and 10 pairs for the outer circle; the 3 pairs of silicon core rods for the inner circle are silicon core rods with low specific resistance, and others for the other two circles are silicon core rods with normal specific resistance. The polycrystalline silicone hydrogen reducing furnace of the utility model can not only realize production of a plurality of pairs of rods with big diamete |
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