Substrate transporting device capable of steer conveying substrate in perpendicular angle
The invention relates to a substrate transporting device capable of steer conveying substrate in perpendicular angle between substrate processing lines, which is mounted in the perpendicular angle steer part of the substrate processing line, including: a frame with two frames positioned oppositely,...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention relates to a substrate transporting device capable of steer conveying substrate in perpendicular angle between substrate processing lines, which is mounted in the perpendicular angle steer part of the substrate processing line, including: a frame with two frames positioned oppositely, the position of the one side frame is higher than the other side in the perpendicular direction; a rotational roll mounted on the said frame rotationaly for transporting the substrate; a roll drive part integrately mounted on said frame, exerting rotation force for conveying substrate to the rotational roll and controlling rotating speed; a frame drive part jointing with the bottom of the said frame rotationaly, said frame is rotated in perpendicular angle and is transported to the substrate from the other side, when the substrate is transported to the frame by tilting state. |
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