Method for manufacturing metal oxide layer between the optical waveguide by standard technique

The invention discloses a standard production process metal oxide layer between the optical waveguide approaches, which is characterized, include the following steps.

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1. Verfasser: HONGDA,GU CHEN
Format: Patent
Sprache:eng
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Zusammenfassung:The invention discloses a standard production process metal oxide layer between the optical waveguide approaches, which is characterized, include the following steps.