Aqueous edge bead remover

The present invention relates to an edge bead remover composition for a photoresist composition disposed as a film on a surface comprising from about 0.5 to about 8 Normal solution of a basic compound.

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Bibliographische Detailangaben
1. Verfasser:	DAMMEL RALPH R.,MEYER STEPHEN,SPAK MARK A
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR AUXILIARY PROCESSES IN PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR,STEREO-PHOTOGRAPHIC PROCESSES PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES PHYSICS
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Beschreibung
Zusammenfassung:	The present invention relates to an edge bead remover composition for a photoresist composition disposed as a film on a surface comprising from about 0.5 to about 8 Normal solution of a basic compound.