Apparatus for substrate marking
An apparatus for substrate scribing which can apply scribing force vertically on a substrate is provided. The apparatus comprises a line-forming part for scribing a line on the substrate, a pressing part for applying pressure on the line-forming part, an elevator for moving the pressing part up and...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | An apparatus for substrate scribing which can apply scribing force vertically on a substrate is provided. The apparatus comprises a line-forming part for scribing a line on the substrate, a pressing part for applying pressure on the line-forming part, an elevator for moving the pressing part up and down, an elevating guiding part for leading the elevator, and a pressing guiding part for leading the pressure part. According to the invention, a scribed line can be formed on the substrate precisely by solving the eccentric force which deviates to the X-Y direction. |
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