Miniature mechanical three-axis angular rate sensor

The invention relates to the sensor used to measure three-axial direction angular rate for rotating substance. It includes X, Y, Z three space axial angle rate sensors each of which is made up of ST self test interface circuit, sensing element circuit, charge pump booster circuit, demodulation filter circuit, and output amplifying circuit. The output of the self test interface and charge pump circuit are respectively connected with the input of the sensing element circuit of which output is connected with output amplifying circuit by demodulation filter circuit. Angle rate sensor based on resonator gyro principle uses sensing element formed by MEMS technique chip to receive electrical signal caused by Cuneo sport for the substance with angle rate. The electrical signal is processed by demodulation filter circuit and output amplifying circuit to output analogue signal which be in direct proportion to angle rate to corresponding micro processor. The product has the advantages of reasonable structure, convenient operation, little size, low fabricating cost, wide application in inertia measurement, vehicle stabilization control, strap down INAS fields etc.