Semiconductor device and method for fabricating the same
A semiconductor device includes: an isolation region formed in a semiconductor substrate; an active region formed in the semiconductor substrate and surrounded by the isolation region; a fully-silicided gate line formed on the isolation region and the active region; and an insulating sidewall contin...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A semiconductor device includes: an isolation region formed in a semiconductor substrate; an active region formed in the semiconductor substrate and surrounded by the isolation region; a fully-silicided gate line formed on the isolation region and the active region; and an insulating sidewall continuously covering a side face of the gate line. At least a portion of the gate line has a projection projecting from the sidewall. |
---|