Semiconductor device and method for fabricating the same

A semiconductor device includes: an isolation region formed in a semiconductor substrate; an active region formed in the semiconductor substrate and surrounded by the isolation region; a fully-silicided gate line formed on the isolation region and the active region; and an insulating sidewall contin...

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1. Verfasser: SATOU YOSHIHIRO,HIRASE JUNJI
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor device includes: an isolation region formed in a semiconductor substrate; an active region formed in the semiconductor substrate and surrounded by the isolation region; a fully-silicided gate line formed on the isolation region and the active region; and an insulating sidewall continuously covering a side face of the gate line. At least a portion of the gate line has a projection projecting from the sidewall.