Guide track transmissioner of crystal-boat box with safety baffle

The invention is concerned with the crystal boat box guide-rail rigging equipment (R/M) with security baffle, the characteristic is: the security baffle sets at the aitch frame structure that is at one side of the outer position (OP) of the wafer storage-stand whole structure (STK), divides the whol...

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Bibliographische Detailangaben
1. Verfasser: YINJUAN,ZHENG ZHANG
Format: Patent
Sprache:eng
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