Guide track transmissioner of crystal-boat box with safety baffle

The invention is concerned with the crystal boat box guide-rail rigging equipment (R/M) with security baffle, the characteristic is: the security baffle sets at the aitch frame structure that is at one side of the outer position (OP) of the wafer storage-stand whole structure (STK), divides the whol...

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Bibliographische Detailangaben
1. Verfasser: YINJUAN,ZHENG ZHANG
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention is concerned with the crystal boat box guide-rail rigging equipment (R/M) with security baffle, the characteristic is: the security baffle sets at the aitch frame structure that is at one side of the outer position (OP) of the wafer storage-stand whole structure (STK), divides the whole space of the crystal boat box guide-rail rigging equipment (R/M) into several small spaces by the security baffle, forms the grid structure, the security baffle fixes on the aitch frame structure that is at one side of the outer position (OP) of the wafer storage-stand whole structure (STK). The shape of the security baffle is bend shape that is extrusive outward from the central, the angle between the extrusive central part and the two side part is 150 +1 degrees.