Method for detecting leakage of outer gas into vacuum chamber

A method for detecting inflow of the outside air of a vacuum chamber is provided to measure performance of outside air blocking during processing by performing a light detection of gas existed in the vacuum chamber. Process gas is charged into a vacuum chamber(S10). Gas existed in the vacuum chamber...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	PARK GI-RYANG,GANG HYEON-GRU,CHOE MYEONG-SOO,SANGTAE-JOON
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS TESTING TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR
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