Solvent recovery device and method

An apparatus for recovering the high-concentration solvent from the sewage discharged by the anticorrosion agent stripping step is composed of a resin component remover, the first distilling tower for removing the low-boiling-point impurities from the sewage, the second distilling tower for removing...

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Bibliographische Detailangaben
1. Verfasser:	KAWASE YASUHITO,AOSHIMA YOSHIYUKI,YAMAUCHI YOICHI,MIZUNO NAOHIRO,ODA AKIMASA,IGARASHI NORIO,MASADA YOSHITAKA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS SEPARATION TRANSPORTING
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Beschreibung
Zusammenfassung:	An apparatus for recovering the high-concentration solvent from the sewage discharged by the anticorrosion agent stripping step is composed of a resin component remover, the first distilling tower for removing the low-boiling-point impurities from the sewage, the second distilling tower for removing the high-boiling-point impurities from the sewage, and a solvent storage tank for supplementing the industrial solvent to said two distilling towers. Its method is also disclosed.