Contaminant reducing substrate transport and support system

Contaminant reducing substrate transport and support system

A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (i...

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Bibliographische Detailangaben
1. Verfasser: PARKHE VIJAY D.,LEOPOLD MATTHEW,RONAN TIMOTHY,MARTIN TODD W.,NG EDWARD,KHURANA NITIN,SUH SONG-MOON,FAY RICHARD,HAGERTY CHRISTOPHER,RICE MICHAEL,ANGELO DARRYL,AHMAN KURT J.,TSAI MATTHEW C.,SANSONI STEV
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:A cooling pedestal for supporting a substrate, comprises a support structure having cooling conduits to flow a fluid therethrough to cool the substrate, and a contact surface comprising a coating of a diamond-like carbon. The coating comprises (i) a coefficient of friction of less than about 0.3, (ii) an average surface roughness of less than about 0.4 micrometers, and (iii) a microhardness of at least about 8 GPa.