Apparatus for inspecting substrate and control method for the same

A substrate inspecting apparatus and a controlling method thereof are provided to improve a substrate inspecting time and to perform stably a substrate inspecting process. A substrate inspecting apparatus(10) includes an inspecting unit, a supply unit, and an exhaust unit. The inspecting unit(20) is composed of an inspecting portion(21) for inspecting a substrate, an inspecting stage for supporting the substrate, and a driving portion(25) for moving the inspecting portion and the inspecting stage. The supply unit(30) is installed at an inlet region of the inspecting unit. The supply unit is composed of a plurality of supply stages capable of supplying sequentially substrates to the inspecting unit. The exhaust unit(50) is installed at an outlet region of the inspecting unit. The exhaust unit is composed of a plurality of exhaust stages for supporting the substrates.