Retaining ring with shaped surface

A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portion. The lapping can be performed using a machine that dedicated for use in lapping t...

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Bibliographische Detailangaben
Hauptverfasser:	BALAGANI VENKATA R, ZUNIGA STEVEN M, DOAN TRUNG T, HUGHES KERRY F, FONG MICHAEL JON, HUEY SIDNEY P, WOHLERT MARTIN S, WANG JAMES C, MCALLISTER DOUGLAS R, OH JEONG-HOON, LIN JIAN, MEYER STACY, SCHMIDT JEFFREY, ALLEN ADEN MARTIN, LU DANNY CAM TOAN, DELAMENIE ROMAIN BEAU, GARRETSON CHARLES C, CHEN HUNGIH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
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Beschreibung
Zusammenfassung:	A retaining ring can be shaped by machining or lapping the bottom surface of the ring to form a shaped profile in the bottom surface. The bottom surface of the retaining ring can include flat, sloped and curved portion. The lapping can be performed using a machine that dedicated for use in lapping the bottom surface of retaining rings. During the lapping the ring can be permitted to rotate freelyabout an axis of the ring. The bottom surface of the retaining ring can have curved or flat portions.