Elasticity surface wave device and method of manufacturing the same

First base layers made of TiN or TiO x N y (where, 0 < x < 0.2, x + y = 1) and second base layers made of Cr are provided between interdigital transducer portions and a piezoelectric substrate, and accordingly, it is possible to prevent voids from being generated in the interdigital transducer...

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Bibliographische Detailangaben
1. Verfasser:	FUJIMOTO HARUHIKO,OZAKI KYOSUKE,WAGA SATOSHI,MEGURO TOSHIHIRO,IKEDA TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS
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Beschreibung
Zusammenfassung:	First base layers made of TiN or TiO x N y (where, 0 < x < 0.2, x + y = 1) and second base layers made of Cr are provided between interdigital transducer portions and a piezoelectric substrate, and accordingly, it is possible to prevent voids from being generated in the interdigital transducer portions, which improves a power resistance of the surface acoustic wave device. In addition, since it is possible to prevent the voids from being generated in the interdigital transducer portions, it is possible to suppress the resistance of the interdigital transducer portions from increasing, which can reduce the loss of power. In addition, it is also possible to reduce the variations in a serial resonance frequency and a parallel resonance frequency.