Source for thermal physical vapor deposition of organic electroluminescent layers

PURPOSE: A deposition apparatus of an organic EL(Electro-Luminescence) layer is provided to be capable of uniformly forming the EL layer on the entire surface of a substrate by using a unit deposition source. CONSTITUTION: A deposition apparatus of an organic EL layer, includes a deposition source(1...

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Bibliographische Detailangaben

1. Verfasser:	KIM KI BEOM,KIM SANG DAE,HAN YOON SOO,TAK YOON HEUNG,KIM SEOK JOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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