Source for thermal physical vapor deposition of organic electroluminescent layers

PURPOSE: A deposition apparatus of an organic EL(Electro-Luminescence) layer is provided to be capable of uniformly forming the EL layer on the entire surface of a substrate by using a unit deposition source. CONSTITUTION: A deposition apparatus of an organic EL layer, includes a deposition source(1...

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Bibliographische Detailangaben
1. Verfasser:	KIM KI BEOM,KIM SANG DAE,HAN YOON SOO,TAK YOON HEUNG,KIM SEOK JOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: A deposition apparatus of an organic EL(Electro-Luminescence) layer is provided to be capable of uniformly forming the EL layer on the entire surface of a substrate by using a unit deposition source. CONSTITUTION: A deposition apparatus of an organic EL layer, includes a deposition source(11) for heating the deposition material stored at the inner portion by using a supply voltage and a jet part for jetting the deposition material to the surface of a substrate. At this time, the deposition source is formed into a case type structure. Preferably, the deposition source includes an upper part(11A), a lateral part(11B-1), and a bottom part(11B). Preferably, the deposition source is capable of moving up and down. Preferably, the substrate is capable of moving up and down.