Device for material processing by means of a laser beam guided by a deflecting unit comprising a piezoelectric deflector plate

The device for material processing comprises a laser source (1), for the generation of a laser beam (11), a deflecting unit (2), arranged in the beam path of the laser beam (11) with at least two mirrors (35,45), which may pivot about mirror axes (38,48), forming an angle with each other, and a focussing unit in the form of a lens (5). The drive units for the deflecting unit (2) are each formed by piezoelectric deflector plates (3,4), comprising polarised regions, alternately opposed by means of domain inversion, such that, on application of voltages with alternately opposed polarities, a torsion may be exerted on the free end (35,45) of each deflector plate and hence the mirror axis (38, 48). Substrates (6) such as electrical circuit substrates and circuit boards can thus be processed at extremely high rate and very accurately.