Phototool coating

A phototool having a fluorinated phosph(on)ate coating and methods of using the phototool.

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Bibliographische Detailangaben
1. Verfasser:	LU DAVID D.,PELLERITE MARK J.,FLYNN RICHARD M
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	A phototool having a fluorinated phosph(on)ate coating and methods of using the phototool.