Pressure sensor device

This pressure sensor device comprises a thin sheet-like diaphragm (12) whose surface is formed with a strain resistance gauge, and a stop member (13) having a recess (14) forming a curve along the displacement forming surface of the diaphragm, with the recess facing the diaphragm. Particularly, the...

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Bibliographische Detailangaben
1. Verfasser:	YONEDA MASAYUKI,MIZOGUCHI JUN,KAJIO YASUHIRO,ISHIKAWA MASAYA,AZUMA YOUICHI,TSUCHIYA NAOHISA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	This pressure sensor device comprises a thin sheet-like diaphragm (12) whose surface is formed with a strain resistance gauge, and a stop member (13) having a recess (14) forming a curve along the displacement forming surface of the diaphragm, with the recess facing the diaphragm. Particularly, the recess in the stop member is formed as a curved surface in which its depth (y) with respect to overpressure protection operating pressure (p) at a distance (x) from the center of the diaphragm is expressed by a quartic function [y = pr (1-x /r ) /64D] where r is the radius, t is the thickness, and D is the bending rigidity of the diaphragm.