Measurer of dielectric film microwave complex dielectric permittivity

This invention relates to testing equipment of nm order thickness medium thin film microwave complex dielectric permittivity. It includes resonant cavity, net analyzer and medium substrate. Radiofrequency interconnection devices are set on both ends of the cavity, through hole is set in middle part, the substrate is used to burdening medium thin film, the through hole can be through in it and its two ends are out of the cavity. The input and output ends of the analyzer are connected to the two couplers of the cavity. Substrate coated and uncoated can be separately inserted into the through holes of the cavity to get two groups of resonance frequency and quality factor value. Then the medium thin film complex dielectric permittivity can be got by the two data combined with the cavity, substrate and rectangular protractor of the film. The permittivity includes real part and loss angle tangent. So this invention is a general, precision testing device of medium thin film microwave complex dielectric permittivity.