Vacuum processor

The context discloses a vacuum treatment device which is used on a substrate for etching treatment or spray plating, for example, the use on the glass piece of a liquid crystal display (LCD) panel, on a semiconductor chip, etc. The vacuum treatment device includes an upper cover and a lower cover wh...

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Bibliographische Detailangaben
1. Verfasser:	CHOL HEUN,KIM YOUNGUN,AM HYUN-TACK,LEE SOO-SOUNG,HAN CHAE-PYEONG,CHO SAENG-HYEUN,CHEE DAE-GE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	The context discloses a vacuum treatment device which is used on a substrate for etching treatment or spray plating, for example, the use on the glass piece of a liquid crystal display (LCD) panel, on a semiconductor chip, etc. The vacuum treatment device includes an upper cover and a lower cover which are interconnected. The clearance formed between the upper and the lower covers forms a vacuum treatment space which is sealed or unsealed by a cavity sealing unit through a sealing or unsealing clearance. The device also includes a clearance maintaining unit used for maintaining the clearance and arranged on the upper and the lower covers.