Transmission shaft, roller brush shaft and apparatus for processing substrate

The present invention provides a conveyor shaft for conveying substrates with little bending even if it is elongated. The conveyor shaft for conveying substrates to be treated with a treatment liquidcomprises a core material made of carbon fiber, a shaft part with a coating material made of syntheti...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MAKINO TSUTOMU, SUKE ISOAKI, SACHINOBU NISHIBE, FUJITA SHIGEKI, TAKAHIKO WAKAKAGE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CLEANING CLEANING IN GENERAL CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS PREVENTION OF FOULING IN GENERAL SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	The present invention provides a conveyor shaft for conveying substrates with little bending even if it is elongated. The conveyor shaft for conveying substrates to be treated with a treatment liquidcomprises a core material made of carbon fiber, a shaft part with a coating material made of synthetic resin having resistance for the treatment liquid, coating the outer surface of the core material,and a supporting roller which supports substrates prepared at a predetermined interval in the axial direction of the shaft part.