Method for measuring information about a substrate, and a substrate for use in a lithographic apparatus

A method for measuring information provided by a substrate (W) is disclosed. The substrate (W) includes a feature (300) that has been created by a lithographic apparatus. The method includes projecting a beam of light (100) onto a marker (200) disposed above and/or near the feature (300) on the subs...

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Bibliographische Detailangaben
1. Verfasser: LALBAHADOERSING SANJAY,PIETERS MARCO JOHANNES A.,HAUSCHILD JAN,VAN DE VIN COEN
Format: Patent
Sprache:eng
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Zusammenfassung:A method for measuring information provided by a substrate (W) is disclosed. The substrate (W) includes a feature (300) that has been created by a lithographic apparatus. The method includes projecting a beam of light (100) onto a marker (200) disposed above and/or near the feature (300) on the substrate (W), and detecting information provided by the marker (200) with a sensor. A coating (330) is disposed on the substrate (W) so that the coating (330) lies between the beam of light (100) and the feature (300) to substantially prevent the beam of light (100) from being reflected by the feature (300) and causing an inaccurate readout of the information provided by the marker (200).