Apparatus and method for limiting over travel in a probe card assembly

Apparatus and method for limiting over travel in a probe card assembly

Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A pr...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: COOPER TIMOTHY E.,ELDRIDGE BENJAMIN N.,REYNOLDS CARL V.,SHENOY RAVINDRA V
Format: Patent
Sprache:eng
Schlagworte:
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.