Mocvd formation of Cu2S
A system and methodology are disclosed for forming a passive layer on a conductive layer. The formation can be done during fabrication of an organic memory cell, where the passive layer generally includes a conductivity facilitating compound, such as copper sulfide (Cu2S). The conductivity facilitat...
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Sprache: | eng |
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Zusammenfassung: | A system and methodology are disclosed for forming a passive layer on a conductive layer. The formation can be done during fabrication of an organic memory cell, where the passive layer generally includes a conductivity facilitating compound, such as copper sulfide (Cu2S). The conductivity facilitating compound is deposited onto the conductive layer via plasma enhanced chemical vapor deposition (PECVD) utilizing a metal organic (MO) precursor. The precursor facilitates depositing the conductivity facilitating compound in the absence of toxic hydrogen sulfide (H2S), and at a relatively low temperature and pressure (e.g., between about 400 to 600 K and 0.05 to 0.5 Pa., respectively). The deposition process can be monitored and controlled to facilitate, among other things, depositing the conductivity facilitating compound to a desired thickness. |
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