Method for retrieving organic compound from photoresist and/or desquamation fluid

A process for recovering the organic compounds from the used photoresist and/or stripping liquid includes loading said raw material into complex extracting tower, counter current contact with combined extractant, delivering the liquid extract in back extraction tower, and separating organic compound...

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1. Verfasser: LONGDE,CAO ZHU
Format: Patent
Sprache:eng
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Zusammenfassung:A process for recovering the organic compounds from the used photoresist and/or stripping liquid includes loading said raw material into complex extracting tower, counter current contact with combined extractant, delivering the liquid extract in back extraction tower, and separating organic compounds (isopropanolamine and dimethyl formamide).