Surface wave sensor
Surface wave sensor (1) comprises an antenna (3), transducer (4) and reflectors (5a, 5b) for surface mechanical vibrations generated by the transducer. Additional reflectors (6a, 6b) are arranged on the surface wave sensor in an inactive boundary zone to reflect signals used to determine the actual...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | Surface wave sensor (1) comprises an antenna (3), transducer (4) and reflectors (5a, 5b) for surface mechanical vibrations generated by the transducer. Additional reflectors (6a, 6b) are arranged on the surface wave sensor in an inactive boundary zone to reflect signals used to determine the actual temperature. As the temperature reflectors are positioned in the inactive zone their separation is independent of the mechanical loading of the sensor. The difference signal of the two reflectors can be used to directly determine the chip temperature. |
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