Line defect detection maintenance equipment and method
The present invention relates to LCD making apparatus, and is especially one apparatus capable of detecting the line fault on glass substrate and repairing the fault with laser. The apparatus one pedestal, one substrate bearing stage, one contact probe detection module with contact probe and its dri...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The present invention relates to LCD making apparatus, and is especially one apparatus capable of detecting the line fault on glass substrate and repairing the fault with laser. The apparatus one pedestal, one substrate bearing stage, one contact probe detection module with contact probe and its driving system, one non-contact detection module with non-contact sensor and non-contact detection transmission system, and one laser repair module with laser repair head and laser repair transmission system for repairing line fault on glass substrate with laser. The present invention also relates to the method of detecting and repairing the line fault on glass substrate. |
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