Metal oxide powder for high precision polishing and method of preparation thereof

The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: JOUNG YOUNGKWON, AHN MYUNGHO, LEE INYEON, KWON HYUKJIN
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!