Metal oxide powder for high precision polishing and method of preparation thereof
The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder...
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