Metal oxide powder for high precision polishing and method of preparation thereof

The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder...

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Bibliographische Detailangaben
Hauptverfasser:	JOUNG YOUNGKWON, AHN MYUNGHO, LEE INYEON, KWON HYUKJIN
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS COMPOUNDS THEREOF DRESSING OR CONDITIONING OF ABRADING SURFACES DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING INORGANIC CHEMISTRY MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS NON-METALLIC ELEMENTS PAINTS PERFORMING OPERATIONS POLISHES POLISHING POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH SEMICONDUCTOR DEVICES SKI WAXES TRANSPORTING
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Beschreibung
Zusammenfassung:	The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by formula (alpha =6/(SXrho Xd(XRD)) (I) and formula (beta =weight average particle diameter/d(XRD)) (II); S : specific surface area of the powder; rho : density; and d(XRD) : particle diameter of the powder determined by X-ray diffraction analysis. Independent claims are included for the following: (1) preparing (M1) (I), involves mixing a diluent with a metal oxide precursor to produce a mixture having a diluent content in the range of 40-70 weight %, milling the mixture, calcining the milled mixture, and removing the diluent from the calcined mixture by water washing; and (2) a polishing agent comprising (I).