Metal oxide powder for high precision polishing and method of preparation thereof

The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder...

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Hauptverfasser: JOUNG YOUNGKWON, AHN MYUNGHO, LEE INYEON, KWON HYUKJIN
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creator JOUNG YOUNGKWON
AHN MYUNGHO
LEE INYEON
KWON HYUKJIN
description The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by formula (alpha =6/(SXrho Xd(XRD)) (I) and formula (beta =weight average particle diameter/d(XRD)) (II); S : specific surface area of the powder; rho : density; and d(XRD) : particle diameter of the powder determined by X-ray diffraction analysis. Independent claims are included for the following: (1) preparing (M1) (I), involves mixing a diluent with a metal oxide precursor to produce a mixture having a diluent content in the range of 40-70 weight %, milling the mixture, calcining the milled mixture, and removing the diluent from the calcined mixture by water washing; and (2) a polishing agent comprising (I).
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The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by formula (alpha =6/(SXrho Xd(XRD)) (I) and formula (beta =weight average particle diameter/d(XRD)) (II); S : specific surface area of the powder; rho : density; and d(XRD) : particle diameter of the powder determined by X-ray diffraction analysis. Independent claims are included for the following: (1) preparing (M1) (I), involves mixing a diluent with a metal oxide precursor to produce a mixture having a diluent content in the range of 40-70 weight %, milling the mixture, calcining the milled mixture, and removing the diluent from the calcined mixture by water washing; and (2) a polishing agent comprising (I).</description><edition>7</edition><language>eng</language><subject>ADHESIVES ; BASIC ELECTRIC ELEMENTS ; CHEMISTRY ; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F ; COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS ; COMPOUNDS THEREOF ; DRESSING OR CONDITIONING OF ABRADING SURFACES ; DYES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS ; GRINDING ; INORGANIC CHEMISTRY ; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING ; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE ; METALLURGY ; MISCELLANEOUS APPLICATIONS OF MATERIALS ; MISCELLANEOUS COMPOSITIONS ; NATURAL RESINS ; NON-METALLIC ELEMENTS ; PAINTS ; PERFORMING OPERATIONS ; POLISHES ; POLISHING ; POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH ; SEMICONDUCTOR DEVICES ; SKI WAXES ; TRANSPORTING</subject><creationdate>2005</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20050824&amp;DB=EPODOC&amp;CC=CN&amp;NR=1659252A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25544,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20050824&amp;DB=EPODOC&amp;CC=CN&amp;NR=1659252A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>JOUNG YOUNGKWON</creatorcontrib><creatorcontrib>AHN MYUNGHO</creatorcontrib><creatorcontrib>LEE INYEON</creatorcontrib><creatorcontrib>KWON HYUKJIN</creatorcontrib><title>Metal oxide powder for high precision polishing and method of preparation thereof</title><description>The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by specific formula. The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by formula (alpha =6/(SXrho Xd(XRD)) (I) and formula (beta =weight average particle diameter/d(XRD)) (II); S : specific surface area of the powder; rho : density; and d(XRD) : particle diameter of the powder determined by X-ray diffraction analysis. 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The metal oxide powder (I) comprising aggregates formed by cohesion of primary particles, which has a cohesive degree (alpha ) of 1.1 to 2.0 and a cohesive scale (beta ) of 3 to 10, the cohesive degree (alpha ) and the cohesive scale (beta ) being defined by formula (alpha =6/(SXrho Xd(XRD)) (I) and formula (beta =weight average particle diameter/d(XRD)) (II); S : specific surface area of the powder; rho : density; and d(XRD) : particle diameter of the powder determined by X-ray diffraction analysis. Independent claims are included for the following: (1) preparing (M1) (I), involves mixing a diluent with a metal oxide precursor to produce a mixture having a diluent content in the range of 40-70 weight %, milling the mixture, calcining the milled mixture, and removing the diluent from the calcined mixture by water washing; and (2) a polishing agent comprising (I).</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects ADHESIVES
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F
COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS
COMPOUNDS THEREOF
DRESSING OR CONDITIONING OF ABRADING SURFACES
DYES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
GRINDING
INORGANIC CHEMISTRY
MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING
MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE
METALLURGY
MISCELLANEOUS APPLICATIONS OF MATERIALS
MISCELLANEOUS COMPOSITIONS
NATURAL RESINS
NON-METALLIC ELEMENTS
PAINTS
PERFORMING OPERATIONS
POLISHES
POLISHING
POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH
SEMICONDUCTOR DEVICES
SKI WAXES
TRANSPORTING
title Metal oxide powder for high precision polishing and method of preparation thereof
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