Multi-chamber separated crystal organic metallized gas phase crystallizing device and method

Multi-chamber separated crystal organic metallized gas phase crystallizing device and method

The invention can make Epitaxy reaction for multi light emitting diodes at same time and make different type Epitaxy layer to react independently through adjusting stage time. Thereby multi light emitting diode can form complex number and different type epitaxy layer at same time to reach the purpos...

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Hauptverfasser: DONGHONG CAI, JIONGYU ZHANG, JIACHENG LIU
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator DONGHONG CAI
JIONGYU ZHANG
JIACHENG LIU
description The invention can make Epitaxy reaction for multi light emitting diodes at same time and make different type Epitaxy layer to react independently through adjusting stage time. Thereby multi light emitting diode can form complex number and different type epitaxy layer at same time to reach the purpose of shorten the time of manufacturing.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Multi-chamber separated crystal organic metallized gas phase crystallizing device and method
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