Multi-chamber separated crystal organic metallized gas phase crystallizing device and method
The invention can make Epitaxy reaction for multi light emitting diodes at same time and make different type Epitaxy layer to react independently through adjusting stage time. Thereby multi light emitting diode can form complex number and different type epitaxy layer at same time to reach the purpos...
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The invention can make Epitaxy reaction for multi light emitting diodes at same time and make different type Epitaxy layer to react independently through adjusting stage time. Thereby multi light emitting diode can form complex number and different type epitaxy layer at same time to reach the purpose of shorten the time of manufacturing. |
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