Surface treatment apparatus and method for manufacturing liquid crystal display device

A cleaning apparatus according to the present invention is provided with a brush drive mechanism which brings a brush being rotating closer to a substrate, measures electrical potentials generated on a plurality of conductor patterns formed on the substrate, by a contact and separation with/from tip...

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Bibliographische Detailangaben
Hauptverfasser: KAWANAGO HIROSHI, TAKAHARA YOICHI, YAMADA MASAHIRO, TAKAHASHI TOMOAKI, ASAKA SHOJI, YAMAMOTO HIDEAKI, OHROKU NORIYUKI
Format: Patent
Sprache:eng
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