Driving device for scan probe microscopic probe

The invention discloses a probe driver for scanning probe microscope, including a fixed groove, a fastening jacket, a slide block, cut crystals and piezoelectric ceramic tubes, where the slide block is arranged in the fastening jacket by two pairs of cut crystals fixed on the two sides and fastened with a rectangular jacket and can slide along the inner wall of the rectangular jacket, the rectangular jacket is arranged in the fixed groove through two pairs of cut crystals and can transversely slide in a vertical direction to the driving direction of the cut crystals on the slide block, the piezoelectric ceramic tubes are fixed axially with the slide block, where the piezoelectric ceramic tube connected with the slide block is responsible for vertical motion of the probe and the piezoelectric ceramic tube connected with the probe is responsible for 3D position tuning. It can realize high-accuracy large-range regulation of probe 3D position in an extremely finite small space.