Rectangular vacuum gate valve
The invention is a kind of rectangle vacuum plugboard valve, which is used between the vacuum and the pipe of the atmosphere in the semiconductor industry, which is used to separate or open the electron element, it is made up of valve shell, valve shaft and the valve body. The character lies in: the...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | The invention is a kind of rectangle vacuum plugboard valve, which is used between the vacuum and the pipe of the atmosphere in the semiconductor industry, which is used to separate or open the electron element, it is made up of valve shell, valve shaft and the valve body. The character lies in: the valve shaft bottom has a valve body and a rectangle valve board, when the rotary handle drives the valve shaft to rotate, under the effect of the circle eccentric slot on the lower part of the valve shaft, the rectangle valve board are shifted leftward, seals the rectangle channel aperture needed to be closed, when rotates the handle reversely and pulls it upwards, the closed rectangle channel aperture can be opened. The invention is simple, the efficiency is high.
一种矩形真空插板阀,使用在半导体行业中的真空与大气的管路之间,用于阻隔或打通所输送的电子元器件,它是由阀体外壳(14)、阀门轴(1)及阀体(17)所组成,其特征是在阀门轴(1)的下部安装有阀体(17)及矩形阀板(7),当转动把手(13)带动阀门轴(1)转动,在阀门轴(1)的下部半圆偏心槽(B)的作用下,使矩形阀板(7)向左位移,而封堵住要封闭的矩形通道口,当反向转动把手(13)并上拉把手(13)便可打开被封闭的矩形通道口。本发明操作简单、结构简单、密封好、另件的通过率较好、可靠性高。 |
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