Computer vision based test apparatus and method for micro electro-mechanical systems

The invention discloses a kind of test device and method for micro electromechanical system based on computer vision. The device mainly includes an optical microscope, flash lightening device, MEMS structure sport motivating device, CCD camera. The character lies in: the light house uses high light...

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Bibliographische Detailangaben
1. Verfasser:	XIAOTANG,FENG HU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS TRANSPORTING
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